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We realize vacuum systems according to your needs
Turbo Molecular Pumps (TMP) create the vacuum environment that is indispensable for the manufacturing processes of solar cells and semiconductors. Boasting the highest level of exhaust capacity in the world, Shimadzu's product lineup is designed to meet the layer deposition and fabrication requirements of solar cell modules and silicon wafers, both of which are becoming increasingly large.Turbomolecular pump
Pumping systems
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Automated vacuum pumping station
Application examples:
- Drying processes
- Coating processes
- Filling processes
- Universal application
Control type:
- Pressure-dependent
- Time-controlled
- Can be integrated into existing systems
Pumping systems
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Large pumping stations
Application examples:
- Freeze drying processes
- pharmaceutical products
- Hardening, sintering and other heat treatment processes
- Coating processes
- Evacuation of large containers
Pumping systems
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Modular high vacuum pumping units
Application examples:
- Basic research
- Laboratory applications
- Production
- Analytical technology
- Isolating vacuum
- Mass spectrometry
Pumping systems
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Small pumping stations
Application examples:
- Basic research
- Laboratory applications
- Analytical Technology
- Mass spectrometry
Pumping systems
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Portable vacuum system
Application examples:
- Service insert (hand luggage)
- Scanning electron microscope
- Laboratory applications
- Analytical technology
- Mass spectrometry
Pumping systems
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Special solutions
Special vacuum applications:
- Bubble-free oil filling
- Impregnation process
- Plant extension
- Space-saving design
- System optimization
Vacuum systems
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Leak Test Systems
Application example:
- Can be integrated into production plants
- Laboratory applications
- Production
- Analytical technology
- Insulating vacuum
- Piping systems
- Series and individual testing
- Clean room and semiconductor technology
Operating modes:
- Spray gas process
- Integral process
- Sniffer mode
- Pre-evacuation for extensive particle avoidance in the leak detector
- Can be integrated into plants