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Vacuum pumps repair

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Turbopumps
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Repair and maintenance work on turbomolecular pumps is carried out in accordance with precisely defined procedures (internal work instructions according to ISO 9001). Possible contamination must be reported by the user via contamination declaration. In order to protect the health of our employees, in the event of critical contamination, service work is preceded by neutralization in accordance with regulations. This is followed by a detailed diagnosis of the pumps.  For later verification, external as well as internal damage is recorded and documented.

Within the scope of this documentation, it is often possible to identify the causes of damage. After the cost estimate has been prepared and approved by the customer, the repair work is carried out in accordance with the manufacturer’s specifications. This includes individual activities such as inspection and adjustment work, cleaning, replacement of defective parts, balancing of the rotor, test runs, etc..

Defective control units (frequency controllers) and other electronic components are repaired and adjusted in our electronics workshop.

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Steffen Faisst
Head of High Vacuum "Cryopumps"
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Pfeiffer Vakuum TMH 520
  • Manufactorer:
    Pfeiffer Vakuum
  • Type:
    TMH 520
  • Pumping Speed:
    300 l/s
  • Final Pressure: Without gas ballast
    < 5 x 10-11 mbar
  • Final Pressure: With gas ballast
  • Power Connection:
  • Power Consumption:
  • Inlet Flange:
    DN ISO K 100
  • Condition:
  • Warranty:
  • Operating Fluids:
  • Miscellaneous:
Pfeiffer Vakuum TMH 260
  • Manufactorer:
    Pfeiffer Vakuum
  • Type:
    TMH 260
  • Pumping Speed:
    210 l/s
  • Final Pressure: Without gas ballast
    < 1 x 10-8 mbar
  • Final Pressure: With gas ballast
  • Power Connection:
  • Power Consumption:
  • Inlet Flange:
    DN ISO K 100
  • Condition:
  • Warranty:
  • Operating Fluids:
  • Miscellaneous:
Oerlikon Leybold Turbovac 1000
  • Manufactorer:
    Oerlikon Leybold
  • Type:
    Turbovac 1000
  • Pumping Speed:
    850 l/s
  • Final Pressure: Without gas ballast
    10 x -10 mbar
  • Final Pressure: With gas ballast
  • Power Connection:
  • Power Consumption:
  • Inlet Flange:
    DN ISO K160 auf 200
  • Condition:
  • Warranty:
  • Operating Fluids:
  • Miscellaneous:
Oerlikon Leybold Turbovac 1000
  • Manufactorer:
    Oerlikon Leybold
  • Type:
    Turbovac 1000
  • Pumping Speed:
    850 l/s
  • Final Pressure: Without gas ballast
    10 x -10 mbar
  • Final Pressure: With gas ballast
  • Power Connection:
  • Power Consumption:
  • Inlet Flange:
    DN ISO K160
  • Condition:
  • Warranty:
  • Operating Fluids:
  • Miscellaneous:
Oerlikon Leybold Turbovac 1000
  • Manufactorer:
    Oerlikon Leybold
  • Type:
    Turbovac 1000
  • Pumping Speed:
    850 l/s
  • Final Pressure: Without gas ballast
    10 x -10 mbar
  • Final Pressure: With gas ballast
  • Power Connection:
  • Power Consumption:
  • Inlet Flange:
    DN ISO K160
  • Condition:
  • Warranty:
  • Operating Fluids:
  • Miscellaneous:
Oerlikon Leybold Turbovac 1000 C
  • Manufactorer:
    Oerlikon Leybold
  • Type:
    Turbovac 1000 C
  • Pumping Speed:
    850 l/s
  • Final Pressure: Without gas ballast
    10 x -10 mbar
  • Final Pressure: With gas ballast
  • Power Connection:
  • Power Consumption:
  • Inlet Flange:
    DN ISO K160
  • Condition:
  • Warranty:
  • Operating Fluids:
  • Miscellaneous:
Pfeiffer Vakuum TMU 261
  • Manufactorer:
    Pfeiffer Vakuum
  • Type:
    TMU 261
  • Pumping Speed:
    210 l/s
  • Final Pressure: Without gas ballast
    < 1 x 10-7 mbar
  • Final Pressure: With gas ballast
  • Power Connection:
  • Power Consumption:
  • Inlet Flange:
    DN 100CF auf ISO K 100
  • Condition:
  • Warranty:
  • Operating Fluids:
  • Miscellaneous: