Over the years, Infraserv has constantly expanded its know-how and the services it offers:
Development and Milestones
1993
Founded with a Focus on Vacuum Pump Repairs and Cleanroom Services
1995
Beginning of Repair of Turbomolecular Pumps
1997
Expansion to Include Cryopump Servicing for all Manufacturers
2003
Relocation and Expansion of Service and Repair Capacities
2004
Launch of Training Courses in Vacuum Technology
2012
Start of Sales and Service for Dry-Running Pumps
2018
Acquisition by SHIMADZU and Launch of Sales and Service for Magnetic-Bearing Turbomolecular Pumps
2021
Integration of the Shimadzu Fluidics Systems Europe Business Unit at the Eching Site
2025
Expansion of the Portfolio through New Partners for Dry-Running Pumps (Hanbell, LOT)
2026
Membership Silicon Saxony
PRIME distributor for INFICON vacuum products in Germany and Austria
Networking and Industry Focus
As a member of Silicon Saxony, Infraserv Vakuumservice GmbH is part of one of Europe’s largest microelectronics and high-tech networks.
This membership fosters ongoing dialogue with leading companies and research institutions in the semiconductor industry and provides early access to technological developments.
Integration of Fluidics Systems
The integration of the Shimadzu Fluidics Systems Europe business unit in 2021 strategically expanded the range of products and services. In addition to vacuum technology, the portfolio has since included robust cast-iron hydraulic pumps and valve blocks, compact power units and bespoke fluidics solutions.
All activities were consolidated at the shared site in Eching, near Munich. This enables customers to benefit from centralised management of all ordering, delivery and service processes, as well as enhanced technical capabilities.
Expertise and Experience
Infraserv Vakuumservice GmbH employs around 43 staff, roughly half of whom work in technical services with extensive experience in the semiconductor industry, cleanroom technology and vacuum technology. This expertise enables a deep understanding of complex processes and forms the basis for practical, cost-effective solutions.
Infraserv Vakuumservice GmbH has been ISO 9001 certified since 1995 and is synonymous with certified quality, structured processes and a high level of reliability.