YEARS OF EXPERIENCE

Elaborate repair and adjustment tools are necessary for this type of pump. After the repair work, all important functions are tested with special test equipment and corrected if necessary.

Within the scope of this documentation, it is often possible to identify the causes of damage. After the cost estimate has been prepared and approved by the customer, the repair work is carried out in accordance with the manufacturer’s specifications. This includes individual activities such as inspection and adjustment work, cleaning, replacement of defective parts, balancing of the rotor, test runs, etc..

Defective control units (frequency controllers) and other electronic components are repaired and adjusted in our electronics workshop.

Cryogenic systems are used in the field of low-temperature technology, cryogenics (Greek “cold”). Cryogenics is the generation of low temperatures <123 Kelvin. These temperatures affect the thermodynamic properties of elementary particles. Cold surfaces are able to condense gases on the correspondingly cooled surfaces and bind them in the process (surface binding). Non-condensable gases are adsorbed at low temperatures using activated carbon. Thus, a wide range of gases can be pumped. Cryogenic systems usually consist of a refrigeration unit (refrigerator), cryopump and cryotherapy compressor. The low temperatures are generated by expanding high gas pressures, which are achieved by using special compressors that can compress helium. With particularly pure helium, temperatures down to about 1K can be achieved. These systems are free of hydrocarbons and are therefore preferably used in semiconductor, coating and similar processes within the industry. Cryogenic systems are also required in basic research and applications with superconducting materials. Examples of cryogenic applications:

• Atomization of metals
• Ion implantation
• Vapor deposition processes
• Electron beam welding
• Plasma technologies
• Superconducting area

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The adsorber cartridge is replaced after the permissible operating hours have elapsed. It is also possible to use modified adsorber cartridges, which are reusable, cheaper and more sustainable.

When repairing ion getter pumps, special attention must be paid to cleanliness, as outgassing would severely impair pump performance or processes. Depending on the design, the complete overhaul of ion getter pumps includes the renewal of the cathode plates or the titanium grids as well as the complete overhaul of the anode cylinders, high-voltage feedthrough, attached parts and the pump body. The attached magnets are not required for the overhaul, as only a flashover test is performed. We are also able to overhaul the smaller disposable pumps (up to 20l), which are usually disposed of after consumption. This saves high costs, since a new acquisition is no longer necessary. Ion getter pumps are delivered by us after the dry heating, immediately closed with a flange and evacuated. The test run of the ion getter pumps overhauled/regenerated by us is limited to a flashover test. This means a high voltage test with 6KV. This is the guarantee for an intact IGP. We also have great experience and knowledge in the field of ion getter pump and help to optimize the vacuum process at the customer.

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If necessary, the measuring cells are maintained and repaired. All calibration results are documented and passed on to the customer.

• Alcatel
• Pfeiffer
• Alcatel
• Oerlikon Leybold
• Ulvac
• Varian