Vacuum systems tailored to your needs

Turbomolecular pumps create a vacuum environment that is essential for solar cell and semiconductor manufacturing. With the world's highest suction power, Shimadzu's product range is designed to meet the requirements for layer deposition and the production of solar cell modules and silicon wafers, both of which continue to expand.


The long-life bearing mechanism reduces maintenance costs.

  • Combination of magnetic and ceramic bearings.
  • Proprietary damping mechanism provides low vibration and bearing cooling for additional high reliability and long life.

Can also be used in combination with a backing pump.

  • The combination of turbine blades and molecular drag pump achieves ultra-high vacuum even at high fore-vacuum levels.
  • In combination with a small dry vacuum pump, e.g. a diaphragm pump, ultra-high vacuum pressures can be achieved.

Compact model with integrated power supply

  • The power supply unit is integrated into the pump.
    No need to run cables or use a control cabinet.

Improved pumping performance

  • High pumping performance is achieved by applying diluted gas flow analysis and structural analysis technology.

Environmentally friendly

  • Power saving (up to 25% lower power consumption than previous models).

Maximum pump throughput

  • High pump throughput is achieved with a compact housing.

Compact power supply

  • 49% smaller and 50% lighter than previous Shimadzu models


  • In the event of a power failure, magnetic levitation is maintained with regenerated current, reducing wear on the touchdown bearing.

Product request

We look forward to hearing from you!


lease observe the following instructions for environmental labeling of packaging and separate the packaging accordingly.
The identification code of the packaging material according to Decision 129/97/EC
EUR-Lex – 31997D0129 – EN – EUR-Lex (europa.eu)

Il Decreto Legislativo del 3 settembre 2020 ha reso obbligatoria l’etichettatura ambientale in Italia. Il Decreto si riferisce alla Direttiva UE 2018/851
sui rifiuti e alla Direttiva UE 2018/852 sugli imballi e sul loro smaltimento.
Per cortesia fate riferimento alle informazioni che seguono e separate gli imballi di conseguenza.