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Dry Pumps
In cooperation with renowned manufacturers, we offer a comprehensive portfolio of dry-running pumps: from compact fore-vacuum solutions to powerful systems for demanding process chambers. Dry-running vacuum pumps form the reliable basis for clean and stable processes including semiconductor manufacturing, coating- and drying processes, and heat treatment. Thanks to our broad application- and performance areas, we ensure you find exactly the right pump for your needs.
Hanbell
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Dry Pumps
The dry-running pumps from Hanbell Precise Machinery Co., Ltd. are distinguished by their high performance, minimal process contamination, and low maintenance requirements.
PS/PD Series
The PS Series is more than just a pump; it’s a complete solution. It boasts a fast pumping speed, robust construction and an intelligent controller. The PD series is based on the PS series and features an innovative screw rotor design to provide a power-saving solution.
PDM Series
The PDM series combines robust, oil-free screw vacuum technology with a dry design, making it ideal for light to medium-duty applications. It delivers reliable performance even in demanding environments like the semiconductor industry.
iPH Series
The iPH series of screw pumps offers excellent performance and is ideal for a wide range of applications, especially in harsh processes. Their excellent performance is due to the shortest possible gas path for the rotors and the brilliant rotor sealing design.
PMF Series
The PMF series includes compact, energy-efficient, oil-free dry screw vacuum pumps specially designed for light to medium-duty applications — wherever cleanliness, a space-saving design, and quiet operation are essential.
PMH Series
The PHM series features high-performance, oil-free screw vacuum pumps designed for medium to heavy-duty applications. Their robust construction, optimized gas path, and precise rotor sealing ensure stable ultimate pressures and high reliability. Thanks to energy-efficient technologies, including frequency converters and intelligent control systems, they operate with minimal energy consumption, making them ideal for processes such as semiconductor manufacturing, coating, and drying.
LOT Vacuum
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Dry Pumps
LOT Vacuum Co., Ltd. is a South Korean specialist in oil‑ and contaminant‑free dry vacuum pumps, with a primary focus on the semiconductor and display industries.
XD Series
The XD series offers high-performance pumps with large capacity and high ultimate pressure. It was developed for demanding processes in semiconductor manufacturing.
RD Series
The RD series was developed for particularly demanding applications, for example in the display or solar sectors.
DD105 Series
The DD105 series is part of the DD series with a compact design for e.g. 150 mm and 200 mm processes, based on the same design as the larger DD variants. This series is particularly suitable for high particle loads, aggressive chemicals and high gas flows.
DD255 Series
The DD255 series is the larger version of the DD series. It is designed for FPD (flat panel displays), 300 mm and 450 mm applications with high particle loads and aggressive process gas flows.
HD Series
The HD series is designed for high operational reliability, lower operating costs and robust performance even under difficult process conditions, which involve condensates, particles or corrosive media.