Repair

+49 89 319 01 03 mail@infraservgmbh.com Contact Newsletter

YEARS OF EXPERIENCE

Infraserv Vakuumservice GmbH repairs the latest-generation vacuum pumps and components, as well as a wide range of products that are no longer manufactured or supported by their original manufacturers.

We focus on delivering the best possible price-performance ratio and don't do unnecessary blanket repairs. We always consult with you and tailor our service to your specific requirements.

Through regular training, workshops, advanced technical courses and continuing professional development, we ensure that our technicians have the expertise and up-to-date knowledge required to provide you with the highest possible standard of service.

A fully completed contamination declaration must be enclosed with each repair shipment.

Go to Contamination Declaration

Repair Service

Vacuum Pumps Repair

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Rotary Vane Pumps

Vacuum Pumps Repair:

Rotary vane pumps: defective and dirty pumps are restored to a nearly new condition. It is not always necessary to overhaul the entire pump, often the defective pumps can already be repaired by the targeted replacement of wear parts, such as slide valves and bearings. Maintenance work is carried out in accordance with the manufacturer’s specifications. If necessary, stators and rotors are also replaced; we coordinate this with the customer in advance.

Repair Procedure:

Receipt of the Rotary vane pump, e.g. via on-site pickup service or freight forwarder
Inspection and testing of the pump
Disassembly
Oil disposal and, if necessary, PFPE oil regeneration
Cleaning in our 3-stage cleaning line (decontamination if necessary)
Assembly of the pump according to manufacturer’s instructions and specifications
24-hour test run with documentation and final inspection sticker
Painting
Delivery

Infraserv Vakuumservice has been performing backing (löschen) vacuum pump repairs since 1993. ISO 9001:2015 certification is a guarantee of this. A motivated service team of technicians and engineers, a state-of-the-art workshop, an environmentally friendly cleaning line consisting of an ultrasonic bath, glass bead blaster and propanol drying system, and an extensive test facility to check repaired pumps for all important parameters before delivery.

Vacuum Pumps Repair

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Dry-Running Vacuum Pumps

In order not to pollute our customers’ process-relevant areas with hydrocarbon compounds, dry-running vacuum pumps are serviced and repaired at appropriately clean workplaces.

Elaborate repair and adjustment tools are necessary for this type of pump. After the repair work, all important functions are tested with special test equipment and corrected if necessary.

Vacuum pumps repair

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Turbopumps

Repair and maintenance work on turbomolecular pumps is carried out in accordance with precisely defined procedures (internal work instructions according to ISO 9001). Possible contamination must be reported by the user via contamination declaration. In order to protect the health of our employees, in the event of critical contamination, service work is preceded by neutralization in accordance with regulations. This is followed by a detailed diagnosis of the pumps. For later verification, external as well as internal damage is recorded and documented.

Within the scope of this documentation, it is often possible to identify the causes of damage. After the cost estimate has been prepared and approved by the customer, the repair work is carried out in accordance with the manufacturer’s specifications. This includes individual activities such as inspection and adjustment work, cleaning, replacement of defective parts, balancing of the rotor, test runs, etc..

Defective control units (frequency controllers) and other electronic components are repaired and adjusted in our electronics workshop.

Pfeiffer Vakuum TMH 520

Manufactorer:

Pfeiffer Vakuum
Type:

TMH 520
Pumping Speed:

300 l/s
Final Pressure: Without gas ballast

< 5 x 10-11 mbar
Final Pressure: With gas ballast
Power Connection:
Power Consumption:
Inlet Flange:

DN ISO K 100
Condition:
Warranty:
Operating Fluids:
Miscellaneous:

Pfeiffer Vakuum TMH 260

Manufactorer:

Pfeiffer Vakuum
Type:

TMH 260
Pumping Speed:

210 l/s
Final Pressure: Without gas ballast

< 1 x 10-8 mbar
Final Pressure: With gas ballast
Power Connection:
Power Consumption:
Inlet Flange:

DN ISO K 100
Condition:
Warranty:
Operating Fluids:
Miscellaneous:

Oerlikon Leybold Turbovac 1000

Manufactorer:

Oerlikon Leybold
Type:

Turbovac 1000
Pumping Speed:

850 l/s
Final Pressure: Without gas ballast

10 x -10 mbar
Final Pressure: With gas ballast
Power Connection:
Power Consumption:
Inlet Flange:

DN ISO K160 auf 200
Condition:
Warranty:
Operating Fluids:
Miscellaneous:

Oerlikon Leybold Turbovac 1000

Manufactorer:

Oerlikon Leybold
Type:

Turbovac 1000
Pumping Speed:

850 l/s
Final Pressure: Without gas ballast

10 x -10 mbar
Final Pressure: With gas ballast
Power Connection:
Power Consumption:
Inlet Flange:

DN ISO K160
Condition:
Warranty:
Operating Fluids:
Miscellaneous:

Oerlikon Leybold Turbovac 1000

Manufactorer:

Oerlikon Leybold
Type:

Turbovac 1000
Pumping Speed:

850 l/s
Final Pressure: Without gas ballast

10 x -10 mbar
Final Pressure: With gas ballast
Power Connection:
Power Consumption:
Inlet Flange:

DN ISO K160
Condition:
Warranty:
Operating Fluids:
Miscellaneous:

Oerlikon Leybold Turbovac 1000 C

Manufactorer:

Oerlikon Leybold
Type:

Turbovac 1000 C
Pumping Speed:

850 l/s
Final Pressure: Without gas ballast

10 x -10 mbar
Final Pressure: With gas ballast
Power Connection:
Power Consumption:
Inlet Flange:

DN ISO K160
Condition:
Warranty:
Operating Fluids:
Miscellaneous:

Pfeiffer Vakuum TMU 261

Manufactorer:

Pfeiffer Vakuum
Type:

TMU 261
Pumping Speed:

210 l/s
Final Pressure: Without gas ballast

< 1 x 10-7 mbar
Final Pressure: With gas ballast
Power Connection:
Power Consumption:
Inlet Flange:

DN 100CF auf ISO K 100
Condition:
Warranty:
Operating Fluids:
Miscellaneous:

Vacuum pumps repair

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Cryopumps

Infraserv repairs and maintains most of cryogenic pumps on the market:

CTI Torr / CTI On-Board
ULVAC
SHI-APD
Genesis
Leybold
Sumitomo

Infraserv Cryopumps Standard Repair:

Disassemble cold head, clean, rework, adjust valves & valve clearance, assemble cold head with new parts (O-rings, seals, bushings, bearings, aeroquips)
Disassemble displacer, clean lead shot if necessary. Bake out Displacer, Lead Shot, assemble, renew Seals
Polish cold fingers
Disassemble pump body, clean, refurbish clearance (recoat)
Renew carbon part (15K con. array) and resurface if necessary
Complete pump. Evacuate to test site, perform leak and sniff test
Test run for 24 hours with appropriate compressor
For on board models, zero the module, replace the backup battery and check the RS interface
Also check backup battery and replace if necessary
Pump is delivered sealed, if possible and desired evacuated with blind flange
Test document is enclosed

Cryogenic systems are used in the field of low-temperature technology, cryogenics (Greek “cold”). Cryogenics is the generation of low temperatures <123 Kelvin. These temperatures affect the thermodynamic properties of elementary particles. Cold surfaces are able to condense gases on the correspondingly cooled surfaces and bind them in the process (surface binding). Non-condensable gases are adsorbed at low temperatures using activated carbon. Thus, a wide range of gases can be pumped. Cryogenic systems usually consist of a refrigeration unit (refrigerator), cryopump and cryo compressor. The low temperatures are generated by expanding high gas pressures, which are achieved by using special compressors that can compress helium. These systems are free of hydrocarbons and are therefore preferably used in semiconductor, coating and similar processes within the industry. Cryogenic systems are also required in basic research and applications with superconducting materials.

Examples of cryogenic applications:

Atomisation of metals
Ion implantation
Vapor deposition processes
Electron beam welding
Plasma technologies
Superconducting area

Do you have any questions or suggestions? Call us or send us a direct message.

Your contact

Steffen Faisst

Head of High Vacuum "Cryopumps"

faisst@infraservgmbh.com

Make a request now

Vacuum pumps repair

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Compressors

Maintenance of He-compressors includes checking of technical functions, tightness and safety components. In case of contamination of the helium circuit, it is professionally decontaminated. The cooling circuit is checked for proper flow and cleaned if necessary.

The adsorber cartridge is replaced after the permissible operating hours have elapsed. It is also possible to use modified adsorber cartridges, which are reusable, cheaper and more sustainable.

Vacuum Pumps Repair

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Ion Getter Pumps

Ion getter pumps (IGP), also called ion atomizer pumps, are ultra-high vacuum pumps which are mainly used in processes where very low pressures (<10-11 mbar) and low vibration environment are required. The working principle of an ion getter pump is electron impact ionization. There they can be chemically bound or implanted and are thus removed from the residual gas. Chemically reactive molecules are also bound without prior ionization when they strike a getter material (usually titanium). This type of pump only works if high vacuum has already been achieved. Ion getter pumps are not very suitable for noble gases because pumped off noble gas cannot be chemically bound and may be released again. Examples of applications:

Electron scanning microscopy
Plasma technologies
Chemical and biological processes

Translated with www.DeepL.com/Translator (free version)

When repairing ion getter pumps, special attention must be paid to cleanliness, as outgassing would severely impair pump performance or processes. Depending on the design, the complete overhaul of ion getter pumps includes the renewal of the cathode plates or the titanium grids as well as the complete overhaul of the anode cylinders, high-voltage feedthrough, attached parts and the pump body. The attached magnets are not required for the overhaul, as only a flashover test is performed. We are also able to overhaul the smaller disposable pumps (up to 20l), which are usually disposed of after consumption. This saves high costs, since a new acquisition is no longer necessary. Ion getter pumps are delivered by us after the dry heating, immediately closed with a flange and evacuated. The test run of the ion getter pumps overhauled/regenerated by us is limited to a flashover test. This means a high voltage test with 6KV. This is the guarantee for an intact IGP. We also have great experience and knowledge in the field of ion getter pump and help to optimize the vacuum process at the customer.

Do you have any questions or suggestions? Call us or send us a direct message.

Vacuum Pumps Repair

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Calibration of Vacuum Gauges

Vacuum gauges and measuring cells are compared or calibrated within the scope of our test equipment regulations. Our reference measuring cells are re-certified annually by authorized calibration laboratories.

If necessary, the measuring cells are maintained and repaired. All calibration results are documented and passed on to the customer.

Vacuum pumps repair

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Leak Detectors

Infraserv GmbH can service and repair the following leak detectors in its specially equipped workshop. For other devices, simply ask:

Alcatel
Pfeiffer
Alcatel
Oerlikon Leybold
Ulvac
Varian