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Turbomolecular pumps

Shimadzu turbomolecular pumps create the perfect vacuum for manufacturing solar cells and semiconductors. Our range of products ensures reliable processes and a maximum service life when producing silicon wafers and solar cell modules. Additionally, our partner’s dry-running fore-vacuum pumps support all semiconductor processes, including load lock, ALD and CVD.
Magnetic bearing
Hybrid bearing

Turbomolecular pumps

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Magnetic bearing
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TMP-203
Description
  • Separate Stromversorgung
  • Netzwerkverbindung
  • Verschiedene Überwachungsfunktionen
  • Kupplungsfrei
  • Breites Sortiment
  • Product series
    TMP-03/04-Series
  • Ultimate Pressure
    Erzwungene Konvektion: 1E-8 Pa
    Wasserkühlung: : 1E-8 Pa
  • Pumping Speed [l/s]
    N2: 190
    He: 140
    H2: 120
  • Compression Ratio
    N2: 1E+9
    He: 6E+4
    H2: 4E+3
  • Cooling method
    Forced convection, Water
  • Inlet flange
    VG100 / ICF 152 / ISO100B / ISO100C
  • Outlet flange
    KF25
  • Critical Backink Pressure [Pa]
    Wasserkühlung: 400
  • Mounting Direction
    In jede gewünschte Richtung
  • Rotated Speed [rpm]
    50000
  • Start-up time (up to 80 % rotated speed) [min]
    5
  • Weight [Kg]
    9
  • Noise [dB(A)]
    60
  • Admissible ambient magnetic field (Radial / Axial) [mT]
    3 / 15
  • Input electric power (voltage / max. power)
    200 - 240 / 450
TMP-303
Description
  • Separate Power Supply
  • Network connection enable
  • Various monitoring functions
  • Coupling-Free
  • Wide ranges lineup
  • Product series
    TMP-03/04-Series
  • Ultimate Pressure
    Forced Air / Water Cooling: 1E-8 Pa
  • Pumping Speed [l/s]
    N2: 320
    He: 340
    H2: 320
  • Compression Ratio
    N2: 1E+9
    He: 8E+4
    H2: 1E+4
  • Cooling method
    Forced convection, Water
  • Inlet flange
    VG100 / ICF 152 / ISO100B / ISO100C
  • Outlet flange
    KF25
  • Critical Backink Pressure [Pa]
    Water Cooling: 400
  • Mounting Direction
    In any desired direction
  • Rotated Speed [rpm]
    45000
  • Start-up time (up to 80 % rotated speed) [min]
    5
  • Weight [Kg]
    14
  • Noise [dB(A)]
    60
  • Admissible ambient magnetic field (Radial / Axial) [mT]
    3 / 15
  • Input electric power (voltage / max. power)
    200 - 240 / 550
TMP-403
Description
  • Separate Power Supply
  • Network connection enable
  • Various monitoring functions
  • Coupling-Free
  • Wide ranges lineup
  • Product series
    TMP-03/04-Series
  • Ultimate Pressure
    Forced Air / Water Cooling: 1E-8 Pa
  • Pumping Speed [l/s]
    N2: 420
    He: 360
    H2: 340
  • Compression Ratio
    N2: 1E+9
    He: 8E+4
    H2: 1E+4
  • Cooling method
    Forced convection, Water
  • Inlet flange
    VG150 / ICF203 / ISO160B / ISO160C
  • Outlet flange
    KF25
  • Critical Backink Pressure [Pa]
    Water Cooling: 400
  • Mounting Direction
    In any desired direction
  • Rotated Speed [rpm]
    45000
  • Start-up time (up to 80 % rotated speed) [min]
    5
  • Weight [Kg]
    14
  • Noise [dB(A)]
    60
  • Admissible ambient magnetic field (Radial / Axial) [mT]
    3 / 15
  • Input electric power (voltage / max. power)
    200 - 240 / 550
TMP-803
Description
  • Separate Power Supply
  • Network connection enable
  • Various monitoring functions
  • Coupling-Free
  • Wide ranges lineup
  • Product series
    TMP-03/04-Series
  • Ultimate Pressure
    Forced Air / Water Cooling: 1E-9 Pa
  • Pumping Speed [l/s]
    N2: 800
    He: 800
    H2: 700
  • Compression Ratio
    N2: 1E+9
    He: 8E+4
    H2: 4E+3
  • Cooling method
    Forced convection, Water
  • Inlet flange
    VG150 / ICF203 / ISO160B
  • Outlet flange
    KF40
  • Critical Backink Pressure [Pa]
    Water Cooling: 665
  • Mounting Direction
    In any desired direction
  • Rotated Speed [rpm]
    35000
  • Start-up time (up to 80 % rotated speed) [min]
    5
  • Weight [Kg]
    33
  • Noise [dB(A)]
    60
  • Admissible ambient magnetic field (Radial / Axial) [mT]
    3 / 15
  • Input electric power (voltage / max. power)
    200 - 240 / 1000
TMP-1003
Description
  • Separate Power Supply
  • Network connection enable
  • Various monitoring functions
  • Coupling-Free
  • Wide ranges lineup
  • Product series
    TMP-03/04-Series
  • Ultimate Pressure
    Forced Air / Water Cooling: 1E-9 Pa
  • Pumping Speed [l/s]
    N2: 1080
    He: 930
    H2: 790
  • Compression Ratio
    N2: 1E+9
    He: 8E+4
    H2: 4E+3
  • Cooling method
    Forced convection, Water
  • Inlet flange
    VG200 / ICF253 / ISO200B
  • Outlet flange
    KF40
  • Critical Backink Pressure [Pa]
    Water Cooling: 665
  • Mounting Direction
    In any desired direction
  • Rotated Speed [rpm]
    35000
  • Start-up time (up to 80 % rotated speed) [min]
    5
  • Weight [Kg]
    32
  • Noise [dB(A)]
    60
  • Admissible ambient magnetic field (Radial / Axial) [mT]
    3 / 15
  • Input electric power (voltage / max. power)
    200 - 240 / 1000
TMP-1103
Description
  • Separate Power Supply
  • Network connection enable
  • Various monitoring functions
  • Coupling-Free
  • Wide ranges lineup
  • Product series
    TMP-03/04-Series
  • Ultimate Pressure
    Forced Air / Water Cooling: 1E-9 Pa
  • Pumping Speed [l/s]
    N2: 1080
    He: 1040
    H2: 800
  • Compression Ratio
    N2: 1E+9
    He: 1E+7
    H2: 1E+6
  • Cooling method
    Forced convection, Water
  • Inlet flange
    VG200 / ICF253 / ISO200B
  • Outlet flange
    KF40
  • Critical Backink Pressure [Pa]
    Water Cooling: 800
  • Mounting Direction
    In any desired direction
  • Rotated Speed [rpm]
    36000
  • Start-up time (up to 80 % rotated speed) [min]
    5
  • Weight [Kg]
    32
  • Noise [dB(A)]
    60
  • Admissible ambient magnetic field (Radial / Axial) [mT]
    3 / 15
  • Input electric power (voltage / max. power)
    200 - 240 / 1000
TMP-1303
Description
  • Separate Stromversorgung
  • Netzwerkverbindung
  • Verschiedene Überwachungsfunktionen
  • Kupplungsfrei
  • Breites Sortiment
  • Product series
    TMP-03/04-Series
  • Ultimate Pressure
    Erzwungene Konvektion / Wasserkühlung: 1E-9 Pa
  • Pumping Speed [l/s]
    N2: 1300
    He: 1050
    H2: 750
  • Compression Ratio
    N2: 6E+8
    He: 1E+4
    H2: 1E+3
  • Cooling method
    Forced convection, Water
  • Inlet flange
    VG200 / ICF253 / ISO200B
  • Outlet flange
    KF40
  • Critical Backink Pressure [Pa]
    Wasserkühlung: 270
  • Mounting Direction
    In jede gewünschte Richtung
  • Rotated Speed [rpm]
    30300
  • Start-up time (up to 80 % rotated speed) [min]
    7
  • Weight [Kg]
    39
  • Noise [dB(A)]
    60
  • Admissible ambient magnetic field (Radial / Axial) [mT]
    3 / 15
  • Input electric power (voltage / max. power)
    200 - 240 / 1000
TMP-1503
Description
  • Separate Power Supply
  • Network connection enable
  • Various monitoring functions
  • Coupling-Free
  • Wide ranges lineup
  • Product series
    TMP-03/04-Series
  • Ultimate Pressure
    Forced Air / Water Cooling: 1E-8 Pa
  • Pumping Speed [l/s]
    N2: 1500
    He: 1200
    H2: 800
  • Compression Ratio
    N2: 6E+8
    He: 1E+4
    H2: 1E+3
  • Cooling method
    Forced convection, Water
  • Inlet flange
    ICF305 / VG250 / ISO250B
  • Outlet flange
    KF40
  • Critical Backink Pressure [Pa]
    Water Cooling: 270
  • Mounting Direction
    In any desired direction
  • Rotated Speed [rpm]
    30300
  • Start-up time (up to 80 % rotated speed) [min]
    7
  • Weight [Kg]
    42
  • Noise [dB(A)]
    60
  • Admissible ambient magnetic field (Radial / Axial) [mT]
    3 / 15
  • Input electric power (voltage / max. power)
    200 - 240 / 1000
TMP-2203
Description
  • Separate Power Supply
  • Network connection enable
  • Various monitoring functions
  • Coupling-Free
  • Wide ranges lineup
  • Product series
    TMP-03/04-Series
  • Ultimate Pressure
    Water Cooling: 1E-9 Pa
  • Pumping Speed [l/s]
    N2: 2050
    He: 2000
    H2: 1350
  • Compression Ratio
    N2: 1.4E+8
    He: 1E+4
    H2: 1E+3
  • Cooling method
    Water
  • Inlet flange
    VG250 / ICF305 / ISO250B
  • Outlet flange
    KF40
  • Critical Backink Pressure [Pa]
    Water Cooling: 270
  • Mounting Direction
    In any desired direction
  • Rotated Speed [rpm]
    24600
  • Start-up time (up to 80 % rotated speed) [min]
    11
  • Weight [Kg]
    59
  • Noise [dB(A)]
    60
  • Admissible ambient magnetic field (Radial / Axial) [mT]
    3 / 15
  • Input electric power (voltage / max. power)
    200 - 240 / 1200
TMP-2404
Description
  • Separate Power Supply
  • Network connection enable
  • Various monitoring functions
  • Coupling-Free
  • Wide ranges lineup
  • Product series
    TMP-03/04-Series
  • Ultimate Pressure
    Water Cooling: 1E-7 Pa
  • Pumping Speed [l/s]
    N2: 2100
    Ar: 2000
    H2: 1770
    He: 2240
  • Compression Ratio
    N2: 1E+9
    He: 7E+4
    H2: 3E+3
  • Cooling method
    Forced convection, Water
  • Inlet flange
    VG250 / ISO250B
  • Outlet flange
    KF40
  • Critical Backink Pressure [Pa]
    Water Cooling: 270
  • Mounting Direction
    In any desired direction
  • Rotated Speed [rpm]
    27000
  • Start-up time (up to 80 % rotated speed) [min]
    11
  • Weight [Kg]
    70
  • Noise [dB(A)]
    57
  • Admissible ambient magnetic field (Radial / Axial) [mT]
    3 / 15
  • Input electric power (voltage / max. power)
    200 - 240 / 1500
TMP-2804
Description
  • Separate Power Supply
  • Network connection enable
  • Various monitoring functions
  • Coupling-Free
  • Wide ranges lineup
  • Product series
    TMP-03/04-Series
  • Ultimate Pressure
    Water Cooling: 1E-7 Pa
  • Pumping Speed [l/s]
    VG250 - N2: 2800
    VG250 - Ar: 2700
    VG250 - H2: 2100
    VG250 - He: 2800
    ISO250B - N2: 2500
    ISO250B - Ar: 2400
    ISO250B - H2: 2000
    ISO250B - H2: 2600
  • Compression Ratio
    N2: 1E+9
    He: 1E+5
    H2: 6E+3
  • Cooling method
    Water
  • Inlet flange
    VG250 / ISO250B
  • Outlet flange
    KF40
  • Critical Backink Pressure [Pa]
    Water Cooling: 270
  • Mounting Direction
    In any desired direction
  • Rotated Speed [rpm]
    27600
  • Start-up time (up to 80 % rotated speed) [min]
    12
  • Weight [Kg]
    84
  • Noise [dB(A)]
    60
  • Admissible ambient magnetic field (Radial / Axial) [mT]
    3 / 15
  • Input electric power (voltage / max. power)
    200 - 240 / 1500
TMP-3304
Description
  • Separate Power Supply
  • Network connection enable
  • Various monitoring functions
  • Coupling-Free
  • Wide ranges lineup
  • Product series
    TMP-03/04-Series
  • Ultimate Pressure
    Water Cooling: 1E-7 Pa
  • Pumping Speed [l/s]
    N2: 3200
    Ar: 3100
    H2: 2200
    He: 3100
  • Compression Ratio
    N2: 1E+9
    He: 1E+5
    H2: 6E+3
  • Cooling method
    Water
  • Inlet flange
    VG300 / VG350 / ISO320B
  • Outlet flange
    KF40
  • Critical Backink Pressure [Pa]
    Water Cooling: 270
  • Mounting Direction
    In any desired direction
  • Rotated Speed [rpm]
    27600
  • Start-up time (up to 80 % rotated speed) [min]
    12
  • Weight [Kg]
    84
  • Noise [dB(A)]
    60
  • Admissible ambient magnetic field (Radial / Axial) [mT]
    3 / 15
  • Input electric power (voltage / max. power)
    200 - 240 / 1500
TMP-3804
Description
  • Separate Power Supply
  • Network connection enable
  • Various monitoring functions
  • Coupling-Free
  • Wide ranges lineup
  • Product series
    TMP-03/04-Series
  • Ultimate Pressure
    Water Cooling: 1E-7 Pa
  • Pumping Speed [l/s]
    VG300 - N2: 3800
    VG300 - Ar: 3400
    VG300 - H2: 2500
    ISO320B - N2: 4000
    ISO320B - Ar: 3600
    ISO320B - H2: 2500
  • Compression Ratio
    N2: 1E+9
    He: 3E+4
    H2: 2E+3
  • Cooling method
    Water
  • Inlet flange
    VG300 / ISO320B
  • Outlet flange
    KF40
  • Critical Backink Pressure [Pa]
    Water Cooling: 270
  • Mounting Direction
    In any desired direction
  • Rotated Speed [rpm]
    2400
  • Start-up time (up to 80 % rotated speed) [min]
    18
  • Weight [Kg]
    115
  • Noise [dB(A)]
    60
  • Admissible ambient magnetic field (Radial / Axial) [mT]
    3 / 15
  • Input electric power (voltage / max. power)
    200 - 240 / 1500
TMP-4304
Description
  • Separate Power Supply
  • Network connection enable
  • Various monitoring functions
  • Coupling-Free
  • Wide ranges lineup
  • Product series
    TMP-03/04-Series
  • Ultimate Pressure
    Water Cooling: 1E-7 Pa
  • Pumping Speed [l/s]
    N2: 4400
    H2: 4200
    He: 2600
  • Compression Ratio
    N2: 1E+9
    He: 3E+4
    H2: 2E+3
  • Cooling method
    Water
  • Inlet flange
    VG350
  • Outlet flange
    KF40
  • Critical Backink Pressure [Pa]
    Water Cooling: 270
  • Mounting Direction
    In any desired direction
  • Rotated Speed [rpm]
    24000
  • Start-up time (up to 80 % rotated speed) [min]
    18
  • Weight [Kg]
    105
  • Noise [dB(A)]
    60
  • Admissible ambient magnetic field (Radial / Axial) [mT]
    3 / 15
  • Input electric power (voltage / max. power)
    200 - 240 / 1500
TMP-4805
Description
  • Separate Power Supply
  • Network connection enable
  • Various monitoring functions
  • Coupling-Free
  • Wide ranges lineup
  • Product series
    TMP-03/04-Series
  • Ultimate Pressure
    Water Cooling: 1E-7 Pa
  • Pumping Speed [l/s]
    N2: 4500
    Ar: 4300
    H2: 3100
  • Compression Ratio
    N2: 1E+8
    H2: 2E+3
  • Cooling method
    Water
  • Inlet flange
    VG350
  • Outlet flange
    KF40
  • Critical Backink Pressure [Pa]
    Water Cooling: 270
  • Mounting Direction
    In any desired direction
  • Rotated Speed [rpm]
    20580
  • Start-up time (up to 80 % rotated speed) [min]
    12
  • Weight [Kg]
    180
  • Noise [dB(A)]
    61
  • Admissible ambient magnetic field (Radial / Axial) [mT]
    3 / 15
  • Input electric power (voltage / max. power)
    200 - 240 / 2300
TMP-5305
Description
  • Separate Power Supply
  • Network connection enable
  • Various monitoring functions
  • Coupling-Free
  • Wide ranges lineup
  • Product series
    TMP-03/04-Series
  • Ultimate Pressure
    Water Cooling: 1E-7 Pa
  • Pumping Speed [l/s]
    N2: 5300
    Ar: 5100
    H2: 3200
  • Compression Ratio
    N2: 1E+8
    H2: 2E+3
  • Cooling method
    Water
  • Inlet flange
    VG350 / ISO400B
  • Outlet flange
    KF40
  • Critical Backink Pressure [Pa]
    Water Cooling: 270
  • Mounting Direction
    In any desired direction
  • Rotated Speed [rpm]
    20580
  • Start-up time (up to 80 % rotated speed) [min]
    12
  • Weight [Kg]
    160
  • Noise [dB(A)]
    61
  • Admissible ambient magnetic field (Radial / Axial) [mT]
    3 / 15
  • Input electric power (voltage / max. power)
    200 - 240 / 2300
TMP-V1704
Description
  • Integrated power supply
    • No installation of cables or use of a control rack required
  • Compact
  • Energy-saving
  • Product series
    TMP-V-Series
  • Ultimate Pressure
    Water cooling: 1E-7 Pa
  • Pumping Speed [l/s]
    N2: 1400
    Ar: 1350
  • Compression Ratio
    N2: 1E+8
    He: 5E+3
    H2: 9E+2
  • Cooling method
    Water
  • Inlet flange
    VG200 / ISO200B
  • Outlet flange
    KF40
  • Critical Backink Pressure [Pa]
    200
  • Mounting Direction
    In any desired direction
  • Rotated Speed [rpm]
    33700
  • Start-up time (up to 80 % rotated speed) [min]
    9
  • Weight [Kg]
    60
  • Noise [dB(A)]
    60
  • Admissible ambient magnetic field (Radial / Axial) [mT]
    3 / 15
  • Input electric power (voltage / max. power)
    230 / 1200
TMP-V2304
Description
  • Integrated power supply
    • No installation of cables or use of a control rack required
  • Compact
  • Energy-saving
  • Product series
    TMP-V-Series
  • Ultimate Pressure
    Water Cooling: 1E-7 Pa
  • Pumping Speed [l/s]
    N2: 2100
    Ar: 2000
  • Compression Ratio
    N2: 1E+8
    He: 5E+3
    H2: 9E+2
  • Cooling method
    Water
  • Inlet flange
    VG250 / ISO250B
  • Outlet flange
    KF40
  • Critical Backink Pressure [Pa]
    200
  • Mounting Direction
    In any desired direction
  • Rotated Speed [rpm]
    33700
  • Start-up time (up to 80 % rotated speed) [min]
    9
  • Weight [Kg]
    60
  • Noise [dB(A)]
    60
  • Admissible ambient magnetic field (Radial / Axial) [mT]
    3 / 15
  • Input electric power (voltage / max. power)
    230 / 1200
TMP-V2804
Description
  • Integrated power supply
    • No installation of cables or use of a control rack required
  • Compact
  • Energy-saving
  • Product series
    TMP-V-Series
  • Ultimate Pressure
    Water Cooling: 1E-7 Pa
  • Pumping Speed [l/s]
    N2: 2800
    Ar: 2700
  • Compression Ratio
    N2: 1E+9
    He: 1E+5
    H2: 6E+3
  • Cooling method
    Water
  • Inlet flange
    VG250
  • Outlet flange
    KF40
  • Critical Backink Pressure [Pa]
    270
  • Mounting Direction
    In any desired direction
  • Rotated Speed [rpm]
    27600
  • Start-up time (up to 80 % rotated speed) [min]
    16
  • Weight [Kg]
    94
  • Noise [dB(A)]
    60
  • Admissible ambient magnetic field (Radial / Axial) [mT]
    3 / 15
  • Input electric power (voltage / max. power)
    200-250 / 1200
TMP-V3304
Description
  • Integrated power supply
    • No installation of cables or use of a control rack required
  • Compact
  • Energy-saving
  • Product series
    TMP-V-Series
  • Ultimate Pressure
    Water Cooling: 1E-7 Pa
  • Pumping Speed [l/s]
    N2: 3200
    Ar: 3100
  • Compression Ratio
    N2: 1E+9
    He: 1E+5
    H2: 6E+3
  • Cooling method
    Water
  • Inlet flange
    VG300 / VG350 / ISO320B
  • Outlet flange
    KF40
  • Critical Backink Pressure [Pa]
    270
  • Mounting Direction
    In any desired direction
  • Rotated Speed [rpm]
    27600
  • Start-up time (up to 80 % rotated speed) [min]
    16
  • Weight [Kg]
    94
  • Noise [dB(A)]
    60
  • Admissible ambient magnetic field (Radial / Axial) [mT]
    3 / 15
  • Input electric power (voltage / max. power)
    200-250 / 1200
TMP-V4404
Description
  • Integrated power supply
    • No installation of cables or use of a control rack required
  • Compact
  • Energy-saving
  • Product series
    TMP-V-Series
  • Ultimate Pressure
    Water Cooling: 1E-7 Pa
  • Pumping Speed [l/s]
    N2: 4050
    Ar: 4300
  • Compression Ratio
    N2: 1.5E+7
    He: 4.0E+3
    H2: 4.4E+2
  • Cooling method
    Water
  • Inlet flange
    VG350
  • Outlet flange
    KF40
  • Critical Backink Pressure [Pa]
    170
  • Mounting Direction
    In any desired direction
  • Rotated Speed [rpm]
    24000
  • Start-up time (up to 80 % rotated speed) [min]
    12
  • Weight [Kg]
    98
  • Noise [dB(A)]
    60
  • Admissible ambient magnetic field (Radial / Axial) [mT]
    3 / 15
  • Input electric power (voltage / max. power)
    200-250 / 1200
TMP-X1205
Description
  • More Compactly
  • Temperature control function
  • IP54 compliant
  • Energy-saving
  • Product series
    TMP-X-Series
  • Ultimate Pressure
    Water Cooling: 1E-7 Pa
  • Pumping Speed [l/s]
    VG150: N2: 1080
    VG150: Ar: 1020
    VG150: H2: 710
    ISO160B: N2: 950
    ISO160B: Ar: 890
    ISO160B: H2: 680
  • Compression Ratio
    N2: 2E+8
    H2: 8E+2
  • Cooling method
    Water
  • Inlet flange
    VG150 / ISO160B
  • Outlet flange
    KF40
  • Critical Backink Pressure [Pa]
    266
  • Mounting Direction
    In any desired direction
  • Rotated Speed [rpm]
    37200
  • Start-up time (up to 80 % rotated speed) [min]
    8
  • Weight [Kg]
    43
  • Noise [dB(A)]
    57
  • Admissible ambient magnetic field (Radial / Axial) [mT]
    3 / 15
  • Input electric power (voltage / max. power)
    200 - 240 / 750
TMP-X1605
Description
  • More Compactly
  • Temperature control function
  • IP54 compliant
  • Energy-saving
  • Product series
    TMP-X-Series
  • Ultimate Pressure
    Water Cooling: 1E-7 Pa
  • Pumping Speed [l/s]
    VG200 / ISO200B - N2: 1400
    VG200 / ISO200B - Ar: 1330
    VG200 / ISO200B - H2: 750
    VG250 / ISO250B - N2: 1490
    VG250 / ISO250B - Ar: 1420
    VG250 / ISO250B - H2: 780
  • Compression Ratio
    N2: 2E+8
    H2: 8E+2
  • Cooling method
    Water
  • Inlet flange
    VG200 / VG250 / ISO200B / ISO250B
  • Outlet flange
    KF40
  • Critical Backink Pressure [Pa]
    266
  • Mounting Direction
    In any desired direction
  • Rotated Speed [rpm]
    37200
  • Start-up time (up to 80 % rotated speed) [min]
    8
  • Weight [Kg]
    41
  • Noise [dB(A)]
    57
  • Admissible ambient magnetic field (Radial / Axial) [mT]
    3 / 15
  • Input electric power (voltage / max. power)
    200 - 240 / 750
TMP-X3405
Description
  • More Compactly
  • Temperature control function
  • IP54 compliant
  • Energy-saving
  • Product series
    TMP-X-Series
  • Ultimate Pressure
    Water Cooling: 1E-7 Pa
  • Pumping Speed [l/s]
    N2: 3400
    Ar: 3300
    H2: 2300
  • Compression Ratio
    N2: 2E+8
    H2: 1E+3
  • Cooling method
    Water
  • Inlet flange
    VG300 / ISO320B / VG350
  • Outlet flange
    KF40
  • Critical Backink Pressure [Pa]
    270
  • Mounting Direction
    In any desired direction
  • Rotated Speed [rpm]
    27600
  • Start-up time (up to 80 % rotated speed) [min]
    12
  • Weight [Kg]
    89
  • Noise [dB(A)]
    57
  • Admissible ambient magnetic field (Radial / Axial) [mT]
    3 / 15
  • Input electric power (voltage / max. power)
    200 - 240 / 1700

Turbomolecular pumps

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Hybrid bearing
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TMP-B70
Description
  • Low vibration and long lifespan through magnetic bearings and ceramic bearings.
  • High backpressure and hydrogen compression ratio
  • Energy-saving
  • Can be mounted in any orientation.
  • Ultimate Pressure
    Natural Convection: 1E-6
    Forced Air: 1E-8
    Water Cooling: 1E-8
  • Pumping Speed [l/s]
    N2: 70
    He: 60
    H2: 49
    KF40 - N2: 41
    KF40 - He: 46
    KF40 - H2: 42
  • Compression Ratio
    N2: 1E+9
    He: 4E+7
    H2: 4E+5
  • Cooling method
    Natural convection, Forced convection, Water
  • Inlet flange
    DN63CF (ICF114) / VG65 / ISO63K / KF40
  • Outlet flange
    KF16
  • Critical Backink Pressure [Pa]
    200 - 900
  • Mounting Direction
    In any desired direction
  • Rotated Speed [rpm]
    87000
  • Start-up time (up to 80 % rotated speed) [min]
    1.7
  • Weight [Kg]
    4
  • Noise [dB(A)]
    48
  • Admissible ambient magnetic field (Radial / Axial) [mT]
    3 / 15
  • Input electric power (voltage / max. power)
    24 VCD / 120 W
TMP-B300
Description
  • Low vibration and long lifespan through magnetic bearings and ceramic bearings.
  • High backpressure and hydrogen compression ratio
  • Energy-saving
  • Can be mounted in any orientation.
  • Ultimate Pressure
    Natural Convection: 1E-6
    Forced Air: 1E-8
    Water Cooling: 1E-8
  • Pumping Speed [l/s]
    N2: 280
    He: 270
    H2: 220
  • Compression Ratio
    N2: 1E+9
    He: 7E+6
    H2: 1E+5
  • Cooling method
    Natural convection, Forced convection, Water
  • Inlet flange
    VG100 / ICF152 / ISO100
  • Outlet flange
    KF16
  • Critical Backink Pressure [Pa]
    100 - 1300
  • Mounting Direction
    In any desired direction
  • Rotated Speed [rpm]
    60000
  • Start-up time (up to 80 % rotated speed) [min]
    3.5
  • Weight [Kg]
    6.6
  • Noise [dB(A)]
    50
  • Admissible ambient magnetic field (Radial / Axial) [mT]
    3 / 15
  • Input electric power (voltage / max. power)
    24 VCD / 180 W