ende
ende
LOT Vacuum
–
Dry Pumps
LOT Vacuum Co., Ltd. is a South Korean specialist in oil‑ and contaminant‑free dry vacuum pumps, with a primary focus on the semiconductor and display industries.
XD Series
The XD series offers high-performance pumps with large capacity and high ultimate pressure. It was developed for demanding processes in semiconductor manufacturing.
RD Series
The RD series was developed for particularly demanding applications, for example in the display or solar sectors.
DD105 Series
The DD105 series is part of the DD series with a compact design for e.g. 150 mm and 200 mm processes, based on the same design as the larger DD variants. This series is particularly suitable for high particle loads, aggressive chemicals and high gas flows.
DD255 Series
The DD255 series is the larger version of the DD series. It is designed for FPD (flat panel displays), 300 mm and 450 mm applications with high particle loads and aggressive process gas flows.
HD Series
The HD series is designed for high operational reliability, lower operating costs and robust performance even under difficult process conditions, which involve condensates, particles or corrosive media.