Hybrid bearing
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Shimadzu Infraserv Vakuumservice
Shimadzu Infraserv Vakuumservice

Turbomolecular pumps

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Hybrid bearing
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TMP-B70
Description
  • Low vibration and long lifespan through magnetic bearings and ceramic bearings.
  • High backpressure and hydrogen compression ratio
  • Energy-saving
  • Can be mounted in any orientation.
  • Ultimate Pressure
    Natural Convection: 1E-6
    Forced Air: 1E-8
    Water Cooling: 1E-8
  • Pumping Speed [l/s]
    N2: 70
    He: 60
    H2: 49
    KF40 - N2: 41
    KF40 - He: 46
    KF40 - H2: 42
  • Compression Ratio
    N2: 1E+9
    He: 4E+7
    H2: 4E+5
  • Cooling method
    Natural convection, Forced convection, Water
  • Inlet flange
    DN63CF (ICF114) / VG65 / ISO63K / KF40
  • Outlet flange
    KF16
  • Critical Backink Pressure [Pa]
    200 - 900
  • Mounting Direction
    In any desired direction
  • Rotated Speed [rpm]
    87000
  • Start-up time (up to 80 % rotated speed) [min]
    1.7
  • Weight [Kg]
    4
  • Noise [dB(A)]
    48
  • Admissible ambient magnetic field (Radial / Axial) [mT]
    3 / 15
  • Input electric power (voltage / max. power)
    24 VDC / 120 W
TMP-B300
Description
  • Low vibration and long lifespan through magnetic bearings and ceramic bearings.
  • High backpressure and hydrogen compression ratio
  • Energy-saving
  • Can be mounted in any orientation.
  • Ultimate Pressure
    Natural Convection: 1E-6
    Forced Air: 1E-8
    Water Cooling: 1E-8
  • Pumping Speed [l/s]
    N2: 280
    He: 270
    H2: 220
  • Compression Ratio
    N2: 1E+9
    He: 7E+6
    H2: 1E+5
  • Cooling method
    Natural convection, Forced convection, Water
  • Inlet flange
    VG100 / ICF152 / ISO100
  • Outlet flange
    KF16
  • Critical Backink Pressure [Pa]
    100 - 1300
  • Mounting Direction
    In any desired direction
  • Rotated Speed [rpm]
    60000
  • Start-up time (up to 80 % rotated speed) [min]
    3.5
  • Weight [Kg]
    6.6
  • Noise [dB(A)]
    50
  • Admissible ambient magnetic field (Radial / Axial) [mT]
    3 / 15
  • Input electric power (voltage / max. power)
    24 VDC / 180 W