Vacuum Gauges
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Shimadzu Infraserv Vakuumservice
Shimadzu Infraserv Vakuumservice

New in Our Portfolio

As of September 2026, we are a PRIME distributor for INFICON vacuum products in Germany and Austria. Here, you find a selection of INFICON gauges. If you are interested in other INFICON vacuum products, please contact us.

Vacuum Gauges

INFICON PSG55x

Pirani-Gauge

ATM To Medium Vacuum Gauge

The INFICON Pirani Standard Gauge (PSG55x) employs like his brothers PCG55x and PSG50x the most advanced digital Pirani technology available. The rugged sensor design combined with the compact size and the variety of features qualifies as the right product for measurement from low to the high vacuum range.

Now available with EtherCAT digital interface!

Download Data Sheet

Specifications

PSG550 Tungsten
Measuring Principle thermal conductance accurcy to Pirani
Measurement range Torr
mbar		 5×10-5 … 1000
3.8×10-5 … 750
Accuracy (N2)
5×10-4 … 1×10-3 mbar % of reading ±50
1×10-3 … 100 mbar % of reading ±15
100 … 1000 mbar % of reading ±50
Repeatability (N2)
1×10-3 … 100 mbar % of reading ±2
Mounting orientation any
PSG552 Nickel
Measuring Principle thermal conductance accurcy to Pirani
Measurement range Torr
mbar		 3.8×10-5 … 750
5×10-5 … 1000
Accuracy (N2)
5×10-4 … 1×10-3 mbar % of reading ±50
1×10-3 … 100 mbar % of reading ±15
100 … 1000 mbar % of reading ±50
Repeatability (N2)
1×10-3 … 100 mbar % of reading ±2
Mounting orientation any
PSG554 ceramic coated
Measuring Principle thermal conductance accurcy to Pirani
Measurement range Torr
mbar		 5×10-5 … 1000
3.8×10-5 … 750
Accuracy (N2)
5×10-4 … 1×10-3 mbar % of reading ±50
1×10-3 … 100 mbar % of reading ±15
100 … 1000 mbar % of reading ±50
Repeatability (N2)
1×10-3 … 100 mbar % of reading ±2
Mounting orientation any

 

 

INFICON PCG55x

Pirani-Gauge

ATM to Medium Vacuum Gauge

he INFICON Pirani Capacitance Diaphragm Gauge (PCG55x) combines the INFICON Pirani technology with the advantages of a ceramic capacitance diaphragm sensor in a single product.

In the measurement range between 10 mbar and atmosphere the capacitance diaphragm technology provides gas-type independent, highly accurate values for reliable pressure measurement. The PCG55x offers also a variety of features which allows the right product configuration for the demanded application.

 

Download Data Sheet

Specifications

PCG550 Tungsten
Measurement range mbar
Torr		 5×10-5 … 1500
3.8×10-5 … 1125
Accuracy (N2)
5×10-4 … 1×10-3 mbar (N2) % of reading ±50
1×10-3 … 100 mbar (N2) % of reading ±15
100 … 950 mbar % of reading ±5
950 … 1050 mbar % of reading ±2.5
Repeatability 
1×10-3 … 1100 mbar (N2) % of reading ±2
Admissible temperature
Operation (ambient) °C +10 … +50
Storage °C -20 … +65
Bakeout at flange °C ≤80
Bakeout at flange long tube °C ≤250
Supply voltage V (dc) +15 … +30
Setpoint relay
Number of setpoints 2
Range (N2) mbar 5×10-5 … 1000
Relay contact Relay contact n.o., potential free
Hysteresis % of threshold 10
Contact rating solid state relays V (dc)
A (dc)		 ≤30
≤0.3
Contact rating mechanical relays V (dc)
A (dc)		 ≤30
≤1
Switching time ms ≤30
Materials exposed to vacuum W, Ni, NiFe, Al2O3, SnAg, stainless steel, glass
PCG552 Nickel
Measurement range mbar
Torr		 5×10-5 … 1500
3.8×10-5 … 1125
Accuracy (N2)
5×10-4 … 1×10-3 mbar (N2) % of reading ±50
1×10-3 … 100 mbar (N2) % of reading ±15
100 … 950 mbar % of reading ±5
950 … 1050 mbar % of reading ±2.5
Repeatability 
1×10-3 … 1100 mbar (N2) % of reading ±2
Admissible temperature
Operation (ambient) °C +10 … +50
Storage °C -20 … +65
Bakeout at flange °C ≤80
Bakeout at flange long tube °C ≤250
Supply voltage V (dc) +15 … +30
Setpoint relay
Number of setpoints 2
Range (N2) mbar 5×10-5 … 1000
Relay contact Relay contact n.o., potential free
Hysteresis % of threshold 10
Contact rating solid state relays V (dc)
A (dc)		 ≤30
≤0.3
Contact rating mechanical relays V (dc)
A (dc)		 ≤30
≤1
Switching time ms ≤30
Materials exposed to vacuum Ni, NiFe, Al2O3, SnAg, stainless steel, glass
PCG554 ceramic coated
Measurement range mbar
Torr		 5×10-5 … 1500
3.8×10-5 … 1125
Accuracy (N2)
5×10-4 … 1×10-3 mbar (N2) % of reading ±50
1×10-3 … 100 mbar (N2) % of reading ±15
100 … 950 mbar % of reading ±5
950 … 1050 mbar % of reading ±2.5
Repeatability 
1×10-3 … 1100 mbar (N2) % of reading ±2
Admissible temperature
Operation (ambient) °C +10 … +50
Storage °C -20 … +65
Bakeout at flange °C ≤80
Bakeout at flange long tube °C ≤250
Supply voltage V (dc) +15 … +30
Setpoint relay
Number of setpoints 2
Range (N2) mbar 5×10-5 … 1000
Relay contact Relay contact n.o., potential free
Hysteresis % of threshold 10
Contact rating solid state relays V (dc)
A (dc)		 ≤30
≤0.3
Contact rating mechanical relays V (dc)
A (dc)		 ≤30
≤1
Switching time ms ≤30
Materials exposed to vacuum Al2O3, stainless steel

INFICON Trigon® BPG552

Hot Ionization Gauge

ATM to Ultra High Vacuum Dual Gauge

For applications that require a measurement range from UHV (5 x10-10) down to ATM (1000 mbar), the Trigon® family includes the dual technology BPG552 gauge. BPG552 consists of an Bayard-Alpert Hot Ionization sensor element and a classical, robust and reliable Pirani sensor element. The supported Bayard-Alpert dual filament offers superior accuracy, repeatability and longevity.

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Specifications

INFICON Trigon® BPG552
Measurement range (air, O2, CO, N2) 5 × 10-10 … 1000 mbar
Accuracy
1 × 10-8 … 1 x 10-2 mbar  ±15 of reading
100 … 1000 mbar           ±50%
Repeatability 5% of reading, 10-8 …  10-2 mbar (after 10 min. stabilization)
Materials exposed to vacuum stainless steel, NiFe, nickel plating, Hastelloy, glass, iridium, yttrium oxide (Y2O3), Ni, tungsten

INFICON SKY® CDG025D

Capacitance Manometer

Full scale 0.1 ... 1000 Torr / mbar

The INFICON SKY CDG025D Capacitance Diaphragm Gauge line of highly accurate temperature compensated manometers is designed for stable performance in harsh manufacturing tool environments.

Advanced digital electronics improve gauge performance and offer easy handling features such as one pushbutton zero function and setpoint adjustment. The corrosion resistant ceramic sensor provides excellent zero stability with a long life expectancy of several million pressure cycles, including atmospheric bursts. A unique sensor shielding (patent pending) protects the gauge from process contamination.

A robust mechanical design and digital electronics improve EMC compatibility, long term stability and temperature compensation. The CDG025D sets new standards for fast stability after power on and fast recovery from atmospheric pressure exposure.

 

Download Data Sheet

Specifications

1000 Torr / 1100 mbar 500 … 10 Torr / mbar 1 Torr / mbar 
Accuracy % of reading 0.2
Resolution percent FS 0.003
Output signal (analog) V (dc) 0 … +10
Response time ms 30
Materials exposed to vacuum Aluminum oxide ceramic (AI2O3), Vacon 70, stainless steel (AISI 316L), AgCuTi hard solder, sealing glass
0.25 Torr
Accuracy % of reading 0.25
Resolution percent FS 0.003
Output signal (analog) V (dc) 0 … +10
Response time ms 130
Materials exposed to vacuum Aluminum oxide ceramic (AI2O3), Vacon 70, stainless steel (AISI 316L), AgCuTi hard solder, sealing glass
0.1 Torr / mbar
Accuracy % of reading 0.5
Resolution percent FS 0.003
Output signal (analog) V (dc) 0 … +10
Response time ms 130
Materials exposed to vacuum Aluminum oxide ceramic (AI2O3), Vacon 70, stainless steel (AISI 316L), AgCuTi hard solder, sealing glass

 

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